2021上海水磨论坛

2002

  • 2002.03
    Shanghai Micro Electronics Equipment Co., Ltd. was founded in Zhangjiang Hi-tech Park.
  • 2006.04
    Registered trademark of lithography equipment products was approved by State Administration for Industry and Commerce.
  • 2008.11
    Lithography tool as National Science and Technology Major Project under China 10th Five-Year Plan was accepted by Ministry of Science and Technology.
  • 2008.12
    Identified as High and New Technology Enterprises in Shanghai.
  • 2009.12
    Shipped China’s first advanced packaging stepper (SSB500/10A) to the customer.
  • 2010.08
    Identified as Innovative Enterprises in Shanghai.
  • 2011.10
    SSB500 series advanced packaging stepper was approved as National Key and New Product Planning Projects by Ministry of Science and Technology.

2012

  • 2012.05
    SSB500 series stepper achieved initial overseas sales.
  • 2012.06
    SSB500 series advanced packaging stepper was awarded New Patented Products in Shanghai.
  • 2012.11
    SSB500 Stepper was awarded GOLDEN PRIZE by the 14th Session China International Industry Fair.
  • 2012.12
    Research project-Key Technology of Nano Precision Multi-freedom Motion System and Its Application won the second Prize of National Technology Invention Award of 2012.
  • 2013.08
    China’s first projection lithography tool SSB225/10 for G2.5 AM-OLED TFT process was shipped to the customer, and identified as National Key and New Product in 2014.
  • 2013.11
    Named as the first batch of National Exemplary Enterprises of Intellectual Property Rights.
  • 2014.03
    Advanced packaging stepper team was selected as the Innovative Team in Key Fields for Innovative Talents Promotion Program of Ministry of Science and Technology.
  • 2014.10
    SMEE’s innovative and research team was awarded National Advanced Group of Professional and Technical Talents.
  • 2016.01
    SMEE Technology Center was identified as a National Enterprise Technology Center.
  • 2016.06
    Shipped China’s first IC front-end I-line scanner to the customer.
  • 2016.11
    G4.5 High Resolution Projection Lithography Tool for flat panel display was awarded GOLD AWARD by the 18th Session China International Industry Fair.
  • 2017.01
    Accomplished the joint-stock reform and was renamed officially as Shanghai Micro Electronics Equipment (Group) Co., Ltd.
  • 2017.03
    Key Technologies Development and Application of FPD High-precision Patterned Process and Equipment was awarded First Prize of Shanghai Science and Technology Progress.
  • 2017.04
    Key Technologies Pre-research Project for Immersion Lithography Tool was officially accepted.
  • 2017.10
    90nm Step-and-Scan Lithography Demo passed onsite test by experts.
  • 2017.11
    SPA 200 Series Photo Alignment Equipment was awarded SILVER AWARD by the 19th Session China International Industry Fair.
  • 2017.12
    Shipped China’s first G6 high resolution TFT lithography tool.
  • 2018.03
    Project of 90nm Lithography Tool was officially accepted.
  • 2018.06
    SSB500 Stepper was certified as Shanghai Brand among the first batch of enterprises.
  • 2018.09
    600 Series IC Front-end Scanner was awarded SILVER AWARD by the 20th Session China International Industry Fair.
  • 2019.12
    SMEE was granted AEO Certificate by General Administration of Customs, P.R. China. SSB300 Stepper was selected as Single Champion Product in the Manufacturing Industry.
  • 2020.01
    SMEE won the third Pudong New Area Director Quality Award.

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